Planar XY / XY-Theta Air Bearing Stages: Highest Precision Multi-Axis Motion
For the highest performance and precision applications, PI Nelson Air has developed a number of planar XY and XY-Theta air bearing stages. These planar linear slides use air bearings which ride directly on a granite or aluminum base. By eliminating the height stackup and overhung loads typical of stacked stage designs, planar air bearings achieve flatness of travel equal to or better than the actual flatness of the base.
In addition, these parallel-kinematics systems have superior stiffness and load capacity. Because the repeatability of air bearings is much better than mechanical bearings, long travel systems can be calibrated for extremely high accuracies.
Many sizes, configurations and materials are available. PI also offers XYZ stages and gantry systems.
Please contact us to discuss your exact needs and for more detailed specifications.
Features
| Feature | Typical Capability |
|---|---|
| Load Capacity | From 10 lb to 1,000 lb |
| Flatness / Straightness | Better than 0.25 microns available |
| Stiffness | From 50,000 to 2,000,000 lbs/in |
| Feedback | High-resolution, high-accuracy encoders available |
| Dynamics | Acceleration over 1 g available |
| Travel Range | From 100 x 100 mm to 1 m x 1 m |
Planar air bearing stages are available with travel ranges to 1 x 1 meters. More information, specifications, and datasheets >>
Advantages Compared to Stacked XY Stages
No Height Stackup
Planar stages ride directly on a precision granite or aluminum reference base, avoiding the stacked-axis geometry that can amplify Abbe errors and overhung loads.
Superior Flatness and Straightness
The air film averages local surface errors and allows the moving platform to follow the reference surface with exceptional geometric performance.
Higher Stiffness and Load Capacity
The distributed air-bearing support structure provides high stiffness and can support substantial payloads without mechanical contact or bearing wear.
Better Long-Travel Calibration
Because air bearings are highly repeatable and free of stick-slip, long-travel systems can be calibrated for extremely high positioning accuracy.
Typical Applications for Planar Air Bearing Motion Systems
Precision Manufacturing
- Semiconductor wafer inspection
- Flat panel display inspection
- Laser micromachining
- Precision assembly automation
Research and Metrology
- Coordinate measuring systems
- Photonics alignment
- Optical inspection
- Scientific instrumentation
Videos: Planar Air Bearing Motion Systems
Need a custom planar XY air bearing stage or long-travel precision motion system? Contact PI Nelson Air to discuss your application.