The ATLAS-101 motorized linear air bearing stage is a fully-supported, fully preloaded air bearing design. High performance air bearings with integrated direct drive linear motors and optical encoders deliver totally non-contact, frictionless motion with submicron resolution and repeatability. Designed to meet the demanding needs of precision production facilities, these systems are equally suited to laboratory environments where flexibility and ease of use are critical.

Dynamic and Static Performance

Air bearings are the proven standard for superior smoothness of motion and positioning control in high precision applications. Low friction enables smooth acceleration and tight velocity stability. The elimination of stiction and backlash allows positioning resolution of +/-1 encoder count, even at the highest resolution. Without mechanical contact, positioning repeatability is also greatly improved.

Configurations & Accessories

Atlas stages are available in a variety of configuration options as standard and custom products. XY stages, cable carrier assemblies and granite baseplates are just some of the available options. Contact us to discuss your application and we can take you through the entire specification and selection process for choosing the right stage for your project.

Configuration Options:

• XY and XYZ Stage Assemblies
• Pneumatic Counterbalance for Vertical Operation
• Additional Encoder Accuracy and Resolution Options

Datasheets:

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Applications:

• Positioning
• Scanning
• Metrology
• Inspection
• Calibration
• Clean Rooms

Industries:

• Semiconductors
• Optics and Photonics
• Flat Panel Manufacturing
• Medical and Life Sciences
• Solar Panel Manufacturing
• Automation
• Materials Testing
• Automated Inspection